6″ x 6″ XY Stage | 1,000x Optical Magnification | DIC, Polarizing lighting | 1080p HD camera |
New Model !!! MX-500-6R
Flexible, powerful, reliable metallugic wafer IC inspection microscope with excellent 1080p HD imaging performance and measurement
High power long working distance objective lenses of 5x, 10x, 20x, 50x. (100x optional) and 10x/22 eye pieces provide excellent high resolution image performance to meet your micron level inspection needs. MX-500 series metallurgic microscope is designed as a flexible, ergonomic, reliable, day-to-day inspection microscope for metallurgic, wafer, IC and semiconductor. Coupled with bright field, dark field, oblique, polarizing and DIC different interference illumination for enhancing the fine features on your samples. Integrated with latest 1080p HD camera or digital USB microscope camera for image capture and measurement. |
Overview
- High power wafer IC inspection microscope for micron level
- Metallurgic microscope
- 5x, 10x, 20x, 50x high power long work distance objective lenses
- DIC, polarizing, bright field & oblique illumination
- Eye pieces inspection and 1080p HD camera viewing on LCD at the same time
- Precision movement of XY stage 6″x6″ travel
- Fine focus control
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Key Features
- Ergonomic design to reduce work fatigue.
- Flexible and expandable modular design.
- Integrated bright field, dark field, oblique, polarizing, and DIC differential interference illumination are standard. Optional transmitted lighting.
- XY stage travel 158mm x 158mm (6.22″ x 6.22″) with fine knob control for precision positioning of wafer IC & metallurgraphy.
- Long working distance high power objective lenses designed with semi-apochromatic technology.
- 5x 10x, 20x, 50x included. 100x optional.
- 1080p HD camera or digital USB microscope camera on Trinocular port for high definition image capture and measurement.
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Applications
- Wafer IC inspection microscope in semiconductor
- Industrial metallurgic analysis
- High power long working distance inspection microscope
Application Images
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MX-500-6R Specifications
Model |
MX500-6R |
MX500-6RT |
Optical system | Infinity color corrected optical system | |
Eyepiece | High eyepoint plan eyepiece PL10X/22 | |
Objective Lenses | LMPL-BD infinity LWD metallurgical objective (both brightfield and darkfield available) 5X, 10X, 20X, 50X, Optional: 100X. |
|
Optical Magnifications | 50x, 100x, 200x, 500x, Optional 1,000x | |
Viewing head | Erect image, 25° gemel trinocular, reflect rate, binocular : trinocular = 100:0 or 0:100 | |
Nosepiece | Reversed quintuple nosepiece, both brightfield and darkfield available, with DIC slot. | |
Stage | 6” three ply mechanical stage, moving range 158 x 158mm, (6.22″ x 6.22″) glass stage, right hand position X & Y moving wheel with clutch handle for faster movement | 6” three ply mechanical stage, reflected moving range 158 x 158mm (6.22′ x 6.22″0 Transmission moving range: 100 x 100mm, glass stage, right hand position X & Y moving wheel with clutch handle for faster movement |
Body | Coaxial coarse and fine focus system, Coarse adjustment range 33 mm, precision of fine adjustment: 0.001mm, with coarse adjustment stop and tension adjustment. Built-in wide voltage 90V-240V, single power supply output. | Coaxial coarse and fine focus system, Coarse adjustment range 33 mm, precision of fine adjustment: 0.001mm, with coarse adjustment stop and tension adjustment. Built-in wide voltage 90V-240V, dual power supply output. |
Reflective illumination System | With iris diaphragm and aperture diaphragm, both centers adjustable, with filter slot and polarizing device slot, switch rod with oblique lighting. 12V100W halogen bulb, light intensity continuously adjustable. |
|
Polarization | Polarizer and analyzer | |
Illumination Methods | Bright field/Dark field/polarizing/DIC | |
Additional Illumination Method | NA | Transmission light |
Transmission illumination system | NA | Single high-power 5W LED, white, light intensity continuously adjustable. N.A. 0.5 condenser with iris aperture diaphragm |
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System Configuration
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$10,000 price range | Ger Price Quote | New model !!! |